Atomic Layer Deposition
systems and coating services for R&D.
Compact, reliable ALD, PE-ALD, and MLD systems used in 260+ published research studies — from perovskite photovoltaics to lithium-ion batteries to quantum devices. When you need films deposited but not the tool, our Littleton, MA foundry handles rapid-turn coating runs.
200+ Arradiance systems in research and production labs.
Installation count as of year-end 2025.
Buy a system, or send us the work.
There are two ways to work with us. Choose the path that fits how you want to deposit your films.
ALD systems for your lab
Two product families — benchtop GEMStar XT and floor-standing PRIME — for thermal ALD, PE-ALD, and MLD. Designed for reproducible chemistry day-in and day-out.
See the systems →
Coating services on demand
Send us your sample. Our Littleton, MA foundry handles rapid-turn ALD, PE-ALD, and MLD coatings — useful when you need a film deposited once, or when you’re qualifying a process before buying a tool.
Coating services →Two platforms. One process discipline.
Each system is engineered around the same standard: predictable chemistry, repeatable runs, and a service relationship that does not disappear after the install.
GEMStar
The benchtop family for thermal ALD, PE-ALD, and MLD. Three reactor variants: XT (thermal), XT-R (thermal but plasma-ready, with an upgradeable KF-50 PE-ALD reactor), and XT-P (PE-ALD via a 300 W air-cooled direct ICP source). Add glovebox-integrated configurations and a deep options catalog.
PRIME
Floor-standing, with roughly four times the GEMStar XT chamber volume and the same thermal and plasma-enhanced process set. VERDE is the first commercially available thermal and plasma-enhanced molecular layer deposition system, built around organic and hybrid films. PLATINUM is the ALD powerhouse, configurable up to 15 precursor sources.
Find published work in your domain.
Customer examples, published papers, and process notes, grouped by application — go straight to what’s relevant to you.
Solar cells
Electron-transport layers, moisture barriers, and passivation films for perovskite and tandem photovoltaics.
Batteries
Protective and conformal coatings on cathodes and electrodes for longer-lasting lithium-ion batteries.
Superconductors
Barrier, passivation, and multilayer films for superconducting RF cavities and quantum devices.
Catalysis
Catalyst and electrode films for hydrogen production, CO₂ conversion, and fuel cells.
Optoelectronics
Conformal optical and X-ray coatings for photonic structures, detectors, and precision mirrors.
Biotechnology
Biocompatible coatings, thin-film biosensors, and solid-state nanopores for molecular detection.
Not sure which path is right?
Tell us your substrate, your target material, and your throughput. A technical specialist in Littleton, MA will help you decide between owning a system and sending us the job.
Talk to a specialist