Meeting the challenge of high aspect ratio deposition over a broad
range of substrates in a small package.
Economical systems engineered for heavyweight tasks and lightweight budgets
The product line deposits low temperature
conformal metal, semiconductor and insulating
films on planar and high aspect ratio (HAR)
structures. They are designed for uniform
conformal growth of films from precursors that
have a CVD growth component.
The uniformity of thin films can determine
whether a process or device works, the systems are
designed to provide the user with the most
uniform films possible, even in challenging HAR
Marketing@Arradiance.com for more information on GEMStar™