Customer Testimonials

Product Matrix


GEMStar XT Thermal

GEMStar XT-R P Ready


XT Options

Material Bottles

Load Lock

GLovebox Interface

500°C Heated Platen

Legacy Systems


GEMStar-CAT Dual


GEMStar™ Benchtop Atomic Layer Deposition Process Systems

Meeting the challenge of high aspect ratio deposition over a broad range of substrates in a small package. Economical systems engineered for heavyweight tasks and lightweight budgets

The product line deposits low temperature conformal metal, semiconductor and insulating films on planar and high aspect ratio (HAR) structures. They are designed for uniform conformal growth of films from precursors that have a CVD growth component.

The uniformity of thin films can determine whether a process or device works, the systems are designed to provide the user with the most uniform films possible, even in challenging HAR through-hole applications.

Arradiance GEMStar 8" and 6"  Systems

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