GEMStar™ XT ALD Systems

GEMStar-8 With GloveBox Interface

Engineered ALD Materials Engineered Materials ALD Precursor Bottles GEMStar ALD Material Bottle
Atomic Layer Deposition (ALD) Benchtop Systems and Coatings
Arradiance ALD Products
GEMStar™ XT ALD and PEALD Atomic Layer Deposition Systems
We design Benchtop / Desktop Atomic Layer Deposition (ALD) Process Systems for both Thermal ALD and PEALD applications. Much smaller than competitors, our research-lab scale systems deposit uniform oxide, nitride and conductive thin films.

“The GEMStar-8 ALD system is critical to our nanomaterials for clean energy research. In particular, the particle holder has been working perfectly for ALD coatings on nanostructured materials for Li batteries and fuel cells …… even better than expected.” Prof. Andy Sun, Mechanical and Materials Engineering, University of Western Ontario

GEMStar XT offers 100,150 and 200mm Thermal ALD and 200mm PEALD (Plasma Enhanced) Systems

GEMStar XT Benchtop Thermal ALD Systems GEMStar-8 XT PEALD SystemCoating Services for ALD Materials and Processes

We design ALD process to suit your specific performance requirements. Ask us about your needs.

“…We [tried] other sources for ALD but you were the only ones that made it happen…” Dr. Tobias Schaedler, HRL Laboratories, LLC, Malibu, California.

HRL Researchers Develop World's Lightest Material

Custom Process Systems

We design and fabricate custom deposition, gas management and metrology equipment meeting your specific needs.

ALD Microchannel Plate (MCP) Coatings

We invented and patented Atomic Layer Deposition (ALD) technology enabling high-gain and long life Microchannel Plates Amplifiers using virtually any substrate material in any size or shape.